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Optically addressed microelectromechanical systems driven with high-frequency modulated light.

Jed Khoury1, Charles L Woods, Bahareh Haji-Saeed

  • 1Air Force Research Laboratory, Optoelectronic Technology Branch, Hanscom Air Force Base, Bedford, Massachussettes 01731, USA. jed.khoury@hanscom.af.mil

Applied Optics
|February 24, 2007
PubMed
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We introduce a novel operating mode for optically addressed deformable mirrors. This microelectromechanical system device can detect moving targets by deforming membranes with modulated light.

Area of Science:

  • Optoelectronics
  • Microelectromechanical Systems (MEMS)

Background:

  • Optically addressed deformable mirror devices are crucial for adaptive optics and optical systems.
  • Existing devices often have limitations in sensitivity or response speed for dynamic applications.

Purpose of the Study:

  • To propose and analyze a new operational mode for optically addressed deformable mirror devices.
  • To demonstrate the potential of this new mode for detecting moving targets.

Main Methods:

  • The device utilizes an array of metallized membrane mirrors over a photoconductive substrate.
  • A voltage is applied between the membrane and a back electrode, modulated by high-frequency light.
  • Membrane deformation is achieved through impedance and bias redistribution triggered by modulated light illumination.

Related Experiment Videos

Main Results:

  • The proposed device exhibits deformation of the membrane mirrors when illuminated with modulated light.
  • The mechanism relies on the redistribution of impedance and bias within the cascaded structure.
  • This operational principle is identified as suitable for moving target detection.

Conclusions:

  • A new mode of operation for optically addressed deformable mirrors has been successfully proposed and analyzed.
  • The device's mechanism, based on light-induced impedance changes, enables dynamic mirror surface control.
  • This technology shows promise for applications in sensing and detecting moving targets.