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MEMS technology for timing and frequency control.

Clark T C Nguyen¹

¹Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor 48109-2122, USA. ctnguyen@eecs.berkeley.edu

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|March 3, 2007

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Microelectromechanical systems (MEMS) offer advanced micromechanical resonators for radio frequency (RF) filters and oscillators. These high-quality factor (Q) devices promise enhanced robustness and power savings in wireless devices.

Area of Science:

Electrical Engineering
Materials Science
Physics

Background:

Future wireless devices require an increasing number of radio frequency (RF) components.
Existing solutions often face limitations in size, cost, and performance for timing and frequency control.

Purpose of the Study:

To present an overview of microelectromechanical systems (MEMS) technologies for timing and frequency control.
To highlight the potential of micromechanical resonators for RF applications.

Main Methods:

Description of micromechanical RF filters and reference oscillators utilizing vibrating on-chip micromechanical resonators.
Discussion of resonators with quality factors (Q) exceeding 10,000 at 1.5 GHz.
Exploration of advanced three-dimensional MEMS technologies and chip-scale atomic physics packages.

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Main Results:

Demonstration of micromechanical resonators with Q > 10,000 at 1.5 GHz as a viable solution for RF components.
Potential for a paradigm shift in timing and frequency control design, emphasizing high-Q advantages.
Achieved Q > 10(7) in chip-scale atomic physics packages with low power consumption and high clock stability.

Conclusions:

MEMS resonators offer an attractive solution for future multiband, multimode wireless devices.
High-Q MEMS devices can lead to enhanced robustness and power savings.
The development of integrated micromechanical circuit technology is emerging, potentially rivaling integrated transistor circuits.