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Updated: Jul 16, 2026

Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations
Published on: August 21, 2018
Manipulation of micrometer sized particles within a micromachined fluidic device to form two-dimensional patterns
Stefano Oberti1, Adrian Neild, Jürg Dual
1Center of Mechanics, ETH Zurich, CH-8092 Zurich, Switzerland. stefano.oberti@imes.mavt.ethz.ch
Abstract:
Ultrasonic manipulation, which uses acoustic radiation forces, is a contactless manipulation technique. It allows the simultaneous handling of single or numerous particles (e.g., copolymer beads, biological cells) suspended in a fluid, without the need for prior localization. Here it is reported on a method for two-dimensional arraying based on the superposition of two in-plane orthogonally oriented standing pressure waves. A device has been built and the experimental results have been compared with a qualitative analytical model. A single piezoelectric transducer is used to excite the structure to vibration, which consists of a square chamber etched in silicon sealed with a glass plate. A set of orthogonally aligned electrodes have been defined on one surface of the piezoelectric. This allows either a quasi-one-dimensional standing pressure field to be excited in one of two directions or if both electrodes are activated simultaneously a two-dimensional pressure field to be generated. Two different operational modes are presented: two signals identical in amplitude and frequency were used to trap particles in oval shaped clumps; two signals with slightly different frequencies to trap particles in circular clumps. The transition between the two operational modes is also investigated.
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