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Difficulty for oxygen to incorporate into the silicon network during initial O2 oxidation of Si(100)-(2x1)

A Hemeryck1, A J Mayne, N Richard

  • 1Laboratoire d'Analyse et d'Architecture des Systèmes, CNRS, 7 Avenue du Colonel Roche, 31077 Toulouse, France.

The Journal of Chemical Physics
|March 27, 2007
PubMed

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