An electron beam lithography and digital image acquisition system for scanning electron microscopes

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Updated: Jul 16, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

S Russev1, G Tsutsumanova, S Angelov

  • 1Department of Solid State Physics, Faculty of Physics, University of Sofia, 5 J. Bourchier Blvd., 1164 Sofia, Bulgaria. scr@phys.uni-sofia.bg

Journal of Microscopy
|March 27, 2007
PubMed

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