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GaBi alloy liquid metal ion source for microelectronics research
L Bischoff1, W Pilz, Th Ganetsos
1Research Center Dresden-Rossendorf Inc., Institute of Ion Beam Physics and Materials Research, D-01314 Dresden, Germany. l.bischoff@fz-rossendorf.de
Ultramicroscopy
|March 30, 2007
Abstract:
A GaBi alloy liquid metal ion source has been studied. From an analysis of the source mass spectra as a function of emission current, a mechanism is suggested for the production of single- and double-charged ions. There is good agreement with the results of Swanson's investigations of a pure Bi source.
