Atom probe specimen preparation with a dual beam SEM/FIB miller

Area of Science:

• Materials Science
• Analytical Chemistry
• Microscopy

Background:

• Traditional electropolishing methods have limitations in material compatibility and specimen form.
• Advanced specimen preparation is crucial for detailed microstructural characterization.

Purpose of the Study:

• To present dual beam scanning electron microscope/focused ion beam (SEM/FIB) methods for specimen preparation.
• To highlight the complementary nature of SEM/FIB and electropolishing techniques.
• To detail various lift-out (LO) methods for targeted microstructural feature analysis.

Main Methods:

• Fabrication of specimens from thin ribbons, mechanically ground sheets, and fine powders using SEM/FIB.
• Integration of FIB with electropolishing to refine specimen shape, surface finish, and taper angle.
• Utilization of in situ nanomanipulators and platinum deposition for lift-out procedures.

Main Results:

• SEM/FIB enables specimen preparation from a broader range of materials compared to electropolishing alone.
• Lift-out methods allow for precise selection of microstructural features like phases, interfaces, and grain boundaries.
• Development of specialized specimen mounts improves the efficiency and ease of the lift-out procedure.

Conclusions:

• Dual beam SEM/FIB methods significantly expand the scope of materials amenable to advanced specimen preparation.
• Lift-out techniques coupled with SEM/FIB are effective for analyzing specific microstructural regions.
• Innovations in specimen mounts enhance the practicality and reproducibility of these advanced microscopy techniques.