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Two-step preionization scheme for discharge pumped KrF excimer lasers.

S Szatmári1, J Janicskó, J Bohus

  • 1Department of Experimental Physics, University of Szeged, Dóm tér 9, H-6720 Szeged, Hungary.

The Review of Scientific Instruments
|April 7, 2007
PubMed
Summary

This study enhances KrF excimer amplifiers by improving UV preionization and electric pulse rise times. These advancements boost beam quality and stored energy for short-pulse applications.

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Area of Science:

  • Laser Physics
  • Plasma Physics
  • Quantum Electronics

Background:

  • Discharge-pumped KrF excimer amplifiers require optimal preionization and fast excitation pulses for efficient operation.
  • Beam homogeneity and stored energy are critical performance metrics dependent on these parameters.

Purpose of the Study:

  • To present a novel scheme for enhanced UV preionization and improved excitation pulse rise time.
  • To optimize the performance of discharge-pumped KrF excimer amplifiers, particularly for short-pulse generation.

Main Methods:

  • Utilizing an auto-spark-gap UV preionization technique with increased gap separation.
  • Implementing a modified charging circuit to improve discharge quality.
  • Employing an additional pre-preionization scheme to mitigate temporal jitter.

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Main Results:

  • The modified charging circuit significantly enhances discharge quality and amplification properties.
  • The auto-spark-gap UV preionization improves beam homogeneity and stored energy.
  • Temporal jitter issues associated with large gap separations were successfully eliminated.

Conclusions:

  • The presented scheme effectively improves KrF excimer amplifier performance.
  • This method is particularly well-suited for enhancing short-pulse KrF amplifier systems.
  • The optimized preionization and excitation pulse characteristics lead to superior beam quality and energy storage.