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Laser linear encoder with both high fabrication and head-to-scale tolerances.
Chyan-Chyi Wu1, Wen-Jong Wu, Zheng-Seng Pan
1Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu 300, Taiwan.
Applied Optics
|May 22, 2007
Summary
A novel diffractive laser encoder system features an optical head configuration with high manufacturing and alignment tolerances. This design enhances applicability and achieves 37.3 nm accuracy under non-ideal conditions.
Area of Science:
- Optics and Photonics
- Metrology
- Mechanical Engineering
Background:
- Diffractive laser encoders are crucial for high-precision measurement systems.
- Existing designs often face limitations in manufacturing and alignment tolerances.
- Wider applicability requires robust optical configurations.
Purpose of the Study:
- To introduce and analyze a new optical head configuration for a diffractive laser encoder.
- To enhance manufacturing and head-to-scale alignment tolerances.
- To evaluate the measurement performance and accuracy of the new design.
Main Methods:
- Detailed discussion of the encoder's measurement principles.
- Optimization of the grating shape for improved performance.
- Analysis of optical component arrangement and its impact on measurement error.
- Determination of head-to-scale alignment tolerance.
Main Results:
- The new configuration demonstrates high manufacturing and alignment tolerances.
- Optimized grating shape and component arrangement minimize measurement error.
- Measurement accuracy achieved was 37.3 nm with a standard deviation of 25.4 nm under non-ideal conditions.
Conclusions:
- The developed optical head configuration significantly improves the applicability of diffractive laser encoders.
- The design offers robust performance with high accuracy even in non-environmentally controlled settings.
- This advancement holds potential for broader industrial and scientific applications requiring precise measurements.

