Laser linear encoder with both high fabrication and head-to-scale tolerances.

Chyan-Chyi Wu1, Wen-Jong Wu, Zheng-Seng Pan

  • 1Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu 300, Taiwan.

Applied Optics
|May 22, 2007
PubMed
Summary

A novel diffractive laser encoder system features an optical head configuration with high manufacturing and alignment tolerances. This design enhances applicability and achieves 37.3 nm accuracy under non-ideal conditions.

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