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Area of Science:

Optics and Photonics
Surface Science
Materials Characterization

Background:

Interference microscopy is crucial for surface analysis.
High-numerical-aperture objectives offer enhanced resolution.
Understanding signal-structure relationships is key for advanced metrology.

Purpose of the Study:

To correlate Fourier components of interference signals with surface and thin-film properties.
To demonstrate the utility of scanning high-numerical-aperture objectives for 3D metrology.
To establish a method for extracting topographical and thickness information.

Main Methods:

Scanning a high-numerical-aperture objective orthogonal to the object surface.
Analyzing the Fourier components of the generated interference signals.
Relating signal phase and amplitude to object structure.

Main Results:

Fourier components directly correspond to angles of incidence on the surface.
Signal phase and amplitude provide detailed information about 3D topography.
Thickness profiles of thin-film layers can be accurately determined.

Conclusions:

The method enables precise 3D surface and thin-film metrology.
High-numerical-aperture objectives are effective for detailed structural analysis.
Fourier analysis of interference signals is a powerful tool for nanoscale characterization.