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    We developed a simplified theoretical model for interference microscopes, improving surface topography measurements under partially coherent light. This model accurately approximates real-world conditions, enhancing imaging precision.

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    Area of Science:

    • Optical Metrology
    • Microscopy Imaging
    • Surface Characterization

    Background:

    • Interference microscopy is crucial for surface topography measurement.
    • Partially coherent illumination complicates accurate imaging.
    • Existing models may not fully capture imaging properties under these conditions.

    Purpose of the Study:

    • To propose a practical theoretical model for interference microscopes.
    • To account for imaging properties with partially coherent illumination.
    • To simplify the approximation of topography measurement effects.

    Main Methods:

    • Developed a theoretical model incorporating optical system imaging properties.
    • Approximated effects of spatially extended, monochromatic light sources.
    • Utilized a simplified model assuming spatially coherent light and a linear transfer function.

    Main Results:

    • The simplified model accounts for optical aberrations and diffracted wave amplitude attenuation.
    • Simulations using the model align with numerical pupil-plane integration methods.
    • Model predictions show agreement with experimental surface topography measurements.

    Conclusions:

    • The proposed model offers a practical approach to interference microscopy.
    • It accurately approximates topography measurements under specific illumination conditions.
    • This theoretical framework enhances the understanding and application of interference microscopy.