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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling

Peter de Groot1, Xavier Colonna de Lega, Jan Liesener

  • 1Zygo Corporation, Laurel Brook Road, Middlefield, CT 06457, USA. peterd@zygo.com

Optics Express
|June 11, 2008
PubMed

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Atomic Force Microscopy01:08

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...