Microstructures of a Pt/Ni/C multilayer system: an X-ray reflectivity and ion scattering study

Area of Science:

• Materials Science
• Nanotechnology
• Surface Science

Background:

• Multilayer systems are crucial in various applications, requiring precise control over their microstructural properties.
• Understanding the periodic and graded structures of thin films is essential for optimizing device performance.

Purpose of the Study:

• To perform microstructural characterization of a synthetic periodic and graded Platinum/Nickel/Carbon (Pt/Ni/C) multilayer system.
• To determine the detailed layer thicknesses, interface roughness, and grading profile of the multilayer structure.

Main Methods:

• X-ray reflectivity (XRR) measurements were employed for detailed microstructural analysis.
• A theoretical multi-trilayer model with graded periodicity was used to fit the experimental XRR data.
• Rutherford backscattering spectrometry (RBS) was utilized for complementary material analysis.

Main Results:

• The Pt/Ni/C multilayer system exhibits graded periodicity, increasing from the substrate towards the film surface.
• This grading is attributed to a linear increase in carbon layer thickness, with a notable change in slope mid-stack.
• Accurate determination of Pt and Ni layer thicknesses, carbon layer depth variation, and interface roughness (Pt/Ni, Ni/C, C/Pt) was achieved.
• Simulated RBS data, derived from XRR analysis parameters, showed excellent agreement with measured RBS spectra.

Conclusions:

• X-ray reflectivity is a powerful technique for characterizing complex multilayer systems with graded structures.
• The synthetic Pt/Ni/C multilayer exhibits a well-defined graded periodicity, offering potential for tailored applications.
• The combination of XRR and RBS provides a robust approach for validating microstructural models of thin films.