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In Situ Time-dependent Dielectric Breakdown in the Transmission Electron Microscope: A Possibility to Understand the Failure Mechanism in Microelectronic Devices
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In Situ Time-dependent Dielectric Breakdown in the Transmission Electron Microscope: A Possibility to Understand the Failure Mechanism in Microelectronic Devices

Published on: June 26, 2015

Understanding sub-20 nm breakdown behavior of liquid dielectrics

Kumar R Virwani1, Ajay P Malshe, Kamlakar P Rajurkar

  • 1Department of Microelectronics Photonics, University of Arkansas, Fayetteville, Arkansas 72701, USA.

Physical Review Letters
|August 7, 2007
PubMed

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