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Updated: Jul 12, 2026
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Homodyne scanning holography
Joseph Rosen1, Guy Indebetouw, Gary Brooker
1Department of Electrical and Computer Engineering, Ben-Gurion University of the Negev, P. O. Box 653 Beer-Sheva 84105, Israelrosen@ee.bgu.ac.il , http://www.ee.bgu.ac.il/ approximately rosen.
Abstract:
We have developed a modified version of a scanning holography microscope in which the Fresnel Zone Plates (FZP) are created by a homodyne rather than a heterodyne interferometer. Therefore, during the scanning the projected pattern on the specimen is frozen rather than varied as previously. In each scanning period the system produces an on-axis Fresnel hologram. The twin image problem is solved by a linear combination of at least three holograms taken with three FZPs with different phase values.
