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Updated: Jul 12, 2026

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides
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Growth and erosion of thin solid films.

G S Bales, R Bruinsma, E A Eklund

    Science (New York, N.Y.)
    |July 20, 1990
    PubMed
    Summary

    Sputtered thin films exhibit complex surface and internal structures due to growth instability. A simple model explains these features, impacting film properties.

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    Area of Science:

    • Materials Science
    • Physics
    • Surface Science

    Background:

    • Sputtered thin films often display complex morphologies, deviating from expected smooth surfaces.
    • These intricate structures include surface irregularities and internal voids, significantly influencing film properties.

    Purpose of the Study:

    • To investigate the underlying mechanisms responsible for the complex morphology of sputtered thin films.
    • To develop and validate a model that describes the observed surface and bulk features.

    Main Methods:

    • Analysis of thin film growth processes, specifically sputtering.
    • Development of a theoretical model for growth instability.
    • Comparison of model predictions with experimental observations of film morphology.

    Main Results:

    • Identified competitive shadowing as a key factor driving growth instability.
    • Demonstrated that a simple model can accurately reproduce observed thin film morphologies.
    • Highlighted the significant impact of surface and bulk defects on film properties.

    Conclusions:

    • The complex morphology of sputtered thin films arises from a growth instability mechanism known as competitive shadowing.
    • A straightforward model effectively captures the essential characteristics of this instability and resulting film structures.
    • Understanding these morphological features is crucial for controlling the physical properties of thin films.

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