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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Published on: August 15, 2014

An adaptation of the jet stream microelectrode beveler

D W Corson, S Goodman, A Fein

    Science (New York, N.Y.)
    |September 21, 1979
    PubMed
    Abstract

    No abstract available in PubMed .

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