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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

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New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

S F Belykh1, V V Palitsin, I V Veryovkin

  • 1Department of Physics, University of Warwick, Warwick Conventry, UK.

The Review of Scientific Instruments
|September 4, 2007
PubMed

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