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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique

Sang-Jin Kim1, Takahito Ono, Masayoshi Esashi

  • 1Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Sendai, Japan. sjkim@mems.mech.tohoku.ac.jp

The Review of Scientific Instruments
|September 4, 2007
PubMed

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The RLC circuit impedance is defined as the ratio of the supply voltage to the circuit current. Resonance in such a circuit occurs when the imaginary part of this impedance equals zero. This specific condition means that the inductive reactance is exactly equal to the capacitive reactance. The frequency at which this happens is known as the resonant frequency. Mathematically, the resonant frequency is inversely proportional to the square root of the product of the inductance (L) and capacitance...
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