Related Experiment Video
Updated: Feb 28, 2026

16:05
Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
8.0K
Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition
Zhi-Xuan Dai1, Takahito Ono2, Ching-Liang Dai3
1Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan.
Micromachines
|February 27, 2026
Summary
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are advancing intelligent sensing. These technologies are crucial for developing next-generation smart devices and sensors.
Area of Science:
- Engineering
- Materials Science
- Physics
Background:
- Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have seen significant growth.
- These systems are fundamental to intelligent sensing applications.
- Their development is critical for future technological advancements.

