Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

Zhi-Xuan Dai1, Takahito Ono2, Ching-Liang Dai3

  • 1Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan.

Micromachines
|February 27, 2026
PubMed
Summary

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are advancing intelligent sensing. These technologies are crucial for developing next-generation smart devices and sensors.

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