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Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 2nd Edition
Yao-Chuan Tsai1, Pin-Chun Huang2, Ching-Liang Dai3
1Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan.
Micromachines
|March 6, 2025
Summary
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) integrate mechanical and electronic functions at small scales. These technologies enable miniaturized devices with diverse applications in sensing and actuation.
Area of Science:
- Engineering
- Materials Science
- Physics
Background:
- Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) represent a convergence of mechanical engineering and electrical engineering.
- These technologies involve the fabrication of devices with integrated mechanical and electrical functionalities at the micro- and nano-scale.
- The continuous advancement in MEMS and NEMS is driven by the demand for smaller, more efficient, and highly integrated systems.
