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Updated: Jul 12, 2026
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Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies
Published on: March 20, 2015
Laser-induced chemistry for microelectronics
Science (New York, N.Y.)
|February 15, 1985
Abstract:
Laser-controlled chemical reactions are being explored for use in all phases of the processing of semiconductor devices. Laser-induced chemical processing can produce submicrometer features without the aid of photolithography. Research is also providing new information on light-excited and light-enhanced interface reactions.
