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Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

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Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid

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Spring constant calibration of atomic force microscopy cantilevers with a piezosensor transfer standard.

E D Langlois¹, G A Shaw, J A Kramar

¹Materials Science & Engineering Laboratory, National Institute of Standards & Technology, Boulder, Colorado 80305, USA.

The Review of Scientific Instruments

|October 2, 2007

Summary

A new piezosensor method accurately calibrates atomic force microscopy (AFM) cantilever spring constants. This traceable calibration improves quantitative measurements in AFM applications.

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Area of Science:

Materials Science
Nanotechnology
Metrology

Background:

Accurate calibration of atomic force microscopy (AFM) cantilever spring constants is crucial for quantitative nanoscale measurements.
Existing calibration methods can exhibit significant deviations from nominal values, impacting data reliability.

Purpose of the Study:

To introduce and validate a novel method for calibrating AFM cantilever spring constants using a piezosensor.
To establish a force transfer standard traceable to the International System of Units (SI) for cantilever calibration.

Main Methods:

A piezosensor, comprising a piezoresistive cantilever and electronics, was calibrated against the NIST electrostatic force balance (EFB).
Seven single-crystal silicon cantilevers with nominal spring constants ranging from 0.2 to 40 Nm were measured using the calibrated piezosensor.
Results were compared against four independent calibration techniques: thermal noise, Sader method, calibrated nanoindentation load cell, and direct EFB force loading.

Main Results:

The piezosensor method provided spring constant values generally in agreement with other techniques.
Discrepancies of up to 300% were observed between nominal and measured spring constant values across different methods.
The piezosensor approach demonstrated accuracy within +/-10% or better when implemented correctly.

Conclusions:

The piezosensor method offers a reliable and accurate approach for calibrating AFM cantilever spring constants.
This traceable calibration standard enhances the quantitative accuracy of AFM measurements.
Improved calibration methodologies are essential for advancing the extraction of quantitative data in AFM studies.