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Design considerations for the absolute testing approach of aspherics using combined diffractive optical elements.

Gufran S Khan1, Klaus Mantel, Irina Harder

  • 1Institute of Optics, Information and Photonics (Max-Planck Research Group), Friedrich-Alexander-University Erlangen-Nuremberg, Erlangen, Germany. gkhan@optik.uni-erlangen.de

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Calibration of diffractive optical element (DOE) errors is crucial for precise aspheric optical surface testing. This study optimizes combined-DOE design, enhancing measurement consistency and accuracy for rotationally invariant aspherics.

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Area of Science:

  • Optical Engineering
  • Metrology
  • Diffractive Optics

Background:

  • Aspheric optical surfaces require precise testing, often utilizing diffractive optical elements (DOEs) as null elements.
  • Calibration of errors inherent to DOEs is essential for accurate measurements.
  • Previous work introduced a three-position quasi-absolute test for rotationally invariant aspherics using combined-DOEs (combo-DOEs).

Purpose of the Study:

  • To investigate the impact of DOE substrate errors on the calibration procedure for combo-DOEs.
  • To establish design criteria for optimizing combo-DOEs.
  • To enhance the consistency of the quasi-absolute test for aspheric surface metrology.

Main Methods:

  • Investigated the effects of substrate errors on the combo-DOE calibration procedure.
  • Developed criteria for designing optimized combo-DOEs.
  • Compared rotationally varying surface deviations from the optimized combo-DOE test with results from an N-position averaging method.

Main Results:

  • Optimized combo-DOE design significantly enhances the consistency of the calibration procedure.
  • The proposed method effectively calibrates errors caused by the diffractive optical element.
  • Rotationally varying surface deviations obtained using the optimized combo-DOE test closely match those from N-position averaging.

Conclusions:

  • Optimized combo-DOE design is critical for improving the accuracy and reliability of aspheric surface testing.
  • The developed calibration procedure offers a robust method for precise metrology of rotationally invariant aspherics.
  • This approach provides a consistent and accurate alternative to traditional N-position averaging techniques.