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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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A Toolbox for Isophase-Curvature Guided Computation of Metrology Hologram
Ulf Griesmann1, Johannes A Soons1, Gufran S Khan1
1National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
Journal of Research of the National Institute of Standards and Technology
|September 23, 2024
Abstract
No abstract available in PubMed .
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