Jan Niehues1, Peter Lehmann, Klaus Bobey
1University of Applied Science and Art, Von-Ossietzky-Strasse 99, 37085 Goettingen, Germany. jan.niehues@mahr.de
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This study introduces a novel method using a second LED light source to eliminate ghost steps in white-light interferometry measurements. This technique improves high-accuracy topography measurements of challenging surfaces.
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