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Evaluation of both image resolution and contrast-to-noise ratio in scanning electron microscopy

Tohru Ishitani1, Mitsugu Sato

  • 1Research and Development Division, Nanotechnology Products Business Group, Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka-shi, Ibaraki-ken 312-8504, Japan. ishitani-tohru@naka.hitachi-hitec.com

Journal of Electron Microscopy
|November 6, 2007
PubMed

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