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Updated: Jun 30, 2026

Scanning-probe Single-electron Capacitance Spectroscopy
10:53

Scanning-probe Single-electron Capacitance Spectroscopy

Published on: July 30, 2013

C-V measurements of micron diameter metal-oxide-semiconductor capacitors using a scanning-electron-microscope-based

T Zheng1, H Jia, R M Wallace

  • 1Materials Science and Engineering, University of Texas at Dallas, Richardson, Texas 75083, USA.

The Review of Scientific Instruments
|November 6, 2007
PubMed

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