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Updated: Jul 10, 2026

Investigation of Early Plasma Evolution Induced by Ultrashort Laser Pulses
Published on: July 2, 2012
Takahiro Inoue1, Hideyasu Okino, Petru Edward Nica
1Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Akou, Hyogo 678-1205, Japan. inoue@lasti.u-hyogo.ac.jp
A new cryogenic xenon jet system with an annular nozzle enables continuous fast supply of xenon capillary targets for extreme ultraviolet (EUV) sources. Optimizing nozzle design suppressed spray, forming a stable jet for laser-plasma EUV generation.
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