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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Digital holographic microscopy in the deep (193 nm) ultraviolet

Giancarlo Pedrini1, Fucai Zhang, Wolfgang Osten

  • 1Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany. pedrini@ito.uni-stuttgart.de

Applied Optics
|November 13, 2007
PubMed

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