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Sub-10 nm thick microporous membranes made by plasma-defined atomic layer deposition of a bridged silsesquioxane

Ying-Bing Jiang1, George Xomeritakis, Zhu Chen

  • 1Sandia National Laboratories, Department 1815, MS 1349, PO Box 5800, Albuquerque, New Mexico 87185, USA.

Journal of the American Chemical Society
|November 24, 2007
PubMed
Abstract

No abstract available in PubMed .

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