Atomic Force Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
Overview of Electron Microscopy
Scanning Electron Microscopy
Overview of Microscopy Techniques
Transmission Electron Microscopy
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Updated: Jul 9, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
1Materials Science Division, National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720-8197, USA. sub-Angstrom@comcast.net
High-resolution electron microscopy now achieves sub-Angström resolution, surpassing the "one-Angström barrier" for atomic-level material characterization. Further improvements aim for deep sub-Angström imaging, approaching atomic size limits.
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