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Updated: Jun 19, 2026
07:24
Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Early results from an aberration-corrected JEOL 2200FS STEM/TEM at Oak Ridge National Laboratory.
Douglas A Blom1, Lawrence E Allard, Satoshi Mishina
1Oak Ridge National Laboratory, Materials Science & Technology Division, 1 Bethel Valley Road, Oak Ridge, TN 37831-6064, USA. blomda@ornl.gov
Summary
Aberration correctors overcome resolution limits in electron microscopes. A new building at Oak Ridge National Laboratory supports advanced microscopy performance.
Area of Science:
- Materials Science
- Physics
- Electron Microscopy
Background:
- Round electromagnetic lenses in electron microscopes suffer from resolution-limiting aberrations.
- Aberration correctors, utilizing multipole elements, offer a solution to overcome these limitations.
- Advanced electron microscopy requires controlled environments to achieve optimal performance.
Purpose of the Study:
- To describe the installation and performance of a hexapole-based aberration corrector on a JEOL 2200FS FEG STEM/TEM.
- To detail the design, construction, and performance of a new building specifically for aberration-corrected electron microscopes.
- To evaluate the initial performance of the integrated system and identify necessary modifications.
Main Methods:
- Integration of a hexapole aberration corrector (CEOS GmbH) into the probe-forming pathway of a JEOL 2200FS FEG STEM/TEM.
- Construction and environmental performance assessment of the Advanced Microscopy Laboratory at Oak Ridge National Laboratory.
- Microscopy of relevant specimens and implementation of modifications to address resolution-limiting factors.
Main Results:
- Successful integration and operation of the hexapole aberration corrector.
- Demonstration of the Advanced Microscopy Laboratory's suitability for high-performance electron microscopy.
- Identification and elimination of conditions limiting the microscope's resolution.
Conclusions:
- Aberration correctors significantly enhance electron microscope resolution.
- Dedicated, environmentally controlled facilities are crucial for realizing the full potential of advanced microscopy.
- The described system and facility enable high-resolution imaging for scientific discovery.
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