Measurement of complex surface deformation by high-speed dynamic phase-stepped digital speckle pattern interferometry

We describe a high-speed digital speckle pattern interferometer incorporating a line-scan camera and a waveguide phase modulator for the measurement of complex deformation (vibration phase and amplitude) at audio acoustic frequencies. Experimental data show continuous phase-stepped recovery of out-of-plane surface deformation in one dimension, obtained at 100 kHz with 2pi/20-rad (0.02-mum) displacement resolution, for surface velocities of 3.2 mm s>(-1) .