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A Multimodal Wide-Field Fourier-Transform Raman Microscope

A Multimodal Wide-Field Fourier-Transform Raman Microscope

Published on: December 30, 2025

Miniaturized time-scanning Fourier transform spectrometer based on silicon technology.

O Manzardo, H P Herzig, C R Marxer

|December 15, 2007

Summary

We developed a compact Fourier transform spectrometer using microelectromechanical systems. A novel method corrects for mirror nonlinearity, achieving a 6 nm resolution for this miniaturized optical instrument.

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Area of Science:

Optical Engineering
Spectroscopy
Microelectromechanical Systems (MEMS)

Background:

Fourier transform spectrometers (FTS) are crucial for spectral analysis.
Miniaturization of FTS devices is essential for portable applications.
MEMS technology offers a pathway for creating compact optical instruments.

Purpose of the Study:

To present a miniaturized Fourier transform spectrometer (FTS) utilizing optical microelectromechanical system (MEMS) technology.
To address and correct for nonlinearities in the scanning mirror's driving system.
To evaluate the performance and resolution of the developed MEMS-based FTS.

Main Methods:

Design and fabrication of a Michelson interferometer-based FTS incorporating a MEMS scanning mirror.
Utilizing an electrostatic comb drive actuator for mirror displacement.
Implementing a spectral correction method to compensate for driving system nonlinearity.
Characterizing mirror displacement nonlinearity and driving reproducibility.

Main Results:

A miniaturized FTS based on optical MEMS technology was successfully developed.
A nonlinearity of +/-0.5 µm was measured for a 38.5 µm mirror displacement.
A novel method effectively corrected for spectral nonlinearity.
The driving reproducibility was determined to be +/-25 nm.
The corrected FTS achieved a spectral resolution of 6 nm at 633 nm.

Conclusions:

The presented MEMS-based FTS offers a viable solution for miniaturized spectral analysis.
The developed nonlinearity correction method significantly improves spectral accuracy.
The device demonstrates high driving reproducibility and excellent spectral resolution for its size.