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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Elad D Mentovich1, Itshak Kalifa, Alexander Tsukernik
1School of Chemistry & Nanotechnology and Nanoscience Institute, Aviv University, Ramat Aviv, Tel Aviv 69978, Israel.
No abstract available in PubMed .