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Building Langmuir Probes and Emissive Probes for Plasma Potential Measurements in Low Pressure, Low Temperature Plasmas
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A new emissive-probe method for electron temperature measurement in radio-frequency plasmas

Kouta Kusaba1, Haruo Shindo

  • 1Department of Information Telecommunication and Electronics, Tokai University, Kita-kaname 1117, Hiratsuka 259-1292, Japan.

The Review of Scientific Instruments
|January 1, 2008
PubMed

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