Related Experiment Video
Updated: Jul 8, 2026

10:25
Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Electron-beam chemical lithography with aliphatic self-assembled monolayers
Nirmalya Ballav1, Soeren Schilp, Michael Zharnikov
1Angewandte Physikalische Chemie, Universität Heidelberg, 69120 Heidelberg, Germany.
Angewandte Chemie (International Ed. in English)
|January 12, 2008
Summary
No abstract available in PubMed .

