Scanning probe lithography of polymers: tailoring morphology and functionality at the nanometer scale

Woo-Kyung Lee1, Paul E Sheehan

  • 1Chemistry Division, Naval Research Laboratory, Washington D.C. 20375, USA.

Scanning
|January 18, 2008
PubMed
Summary

This review explores polymer patterning using scanning probe lithography (SPL). It details various SPL techniques, their energy sources, and impacts on polymer morphology and functionality for fabrication.