Scanning probe lithography of polymers: tailoring morphology and functionality at the nanometer scale
Woo-Kyung Lee1, Paul E Sheehan
1Chemistry Division, Naval Research Laboratory, Washington D.C. 20375, USA.
Scanning
|January 18, 2008
Abstract:
This article reviews the patterning of the polymer via scanning probe lithography (SPL). Several different lithographies are characterized by the source of the patterned material, whether a mechanical, electrical, or thermal field is used, and whether the lithography modifies morphology, functionality, or both. The merits of the different strategies are discussed with respect to the fabrication goals.


