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Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices
Published on: October 6, 2020
Effects of electrodes with continuously varying thickness on energy trapping in thickness-shear mode quartz
Ji Wang1, Lijun Shen, Jiashi Yang
1Piezoelectric Device Laboratory, Department of Mechanics and Engineering Science, School of Engineering, Ningbo University, 818 Fenghua Road, Ningbo, Zhejiang 315211, China. wangji@nbu.edu.cn
Abstract:
We study the effects of electrodes of nonuniform thickness on thickness-shear vibration frequencies and mode shapes of quartz resonators. This paper extends a previous paper from electrodes of stepped thickness to continuously varying thickness. Numerical results for electrodes of linearly varying thickness are presented. The results show that strong energy trapping can be achieved and adjusted using electrodes with variable thickness.
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