Correlations between visible light scattering and CO2 laser damage to reflective and antireflective coatings

In this work, 10.6-microm pulsed laser damage studies were performed on reflective and antireflective coatings on Si, Ge, and ZnSe substrates. Single-pulse damage threshold determinations were conducted at two different laser spot sizes. A high-resolution TV system was used to perform visible light scattering studies, the results of which correlated with laser damage at 10.6 microm. Single-pulse damage determinations along with visible light scattering and multipulse damage determinations indicate that coating performance can be improved substantially by reducing the density of scattering centers present on the coatings.