Effective-viscosity approach for nonlocal electron kinetics in inductively coupled plasmas

G J M Hagelaar1

  • 1Laboratoire Plasma et Conversion d'Energie (LAPLACE, CNRS-UPS), Bâtiment 3R2, Université de Toulouse, 118 Route de Narbonne, 31062 Toulouse Cedex 9, France. gerjan.hagelaar@laplace.univ-tlse.fr

Physical Review Letters
|February 1, 2008
PubMed

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