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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
High-resolution digital two-color holographic metrology
Pascal Picart1, Denis Mounier, Jean Michel Desse
1LAUM, CNRS, Université du Maine, Le Mans, France. pascal.picart@univ-lemans.fr
Optics Letters
|February 5, 2008
Summary
A novel algorithm enables full object reconstruction in digital color holography using a filter bank. This method achieves high-resolution, simultaneous two-wavelength metrology with wavelength-invariant pixel pitch.
Area of Science:
- Optics and Photonics
- Digital Imaging
- Metrology
Background:
- Digital holography presents challenges in object reconstruction and wavelength dependency.
- Achieving high-resolution and simultaneous multi-wavelength measurements is crucial for advanced metrology.
Purpose of the Study:
- To introduce a new algorithm for digital color holography.
- To enable full object reconstruction with wavelength-invariant pixel pitch.
- To demonstrate its application in high-resolution simultaneous two-wavelength metrology.
Main Methods:
- Development of a filter bank-based algorithm for digital color holography.
- Implementation of a pixel pitch invariant along each wavelength.
- Application of the algorithm to simultaneous two-wavelength metrology.
Main Results:
- The algorithm facilitates complete object reconstruction in digital color holography.
- A pixel pitch invariant across different wavelengths was achieved.
- Successful demonstration of high-resolution simultaneous two-wavelength metrology.
Conclusions:
- The presented algorithm offers a robust solution for digital color holography.
- It overcomes limitations related to wavelength dependency in pixel pitch.
- The method is effective for advanced high-resolution metrology applications.
