A dual-deposition setup for fabricating nanoparticle-thin film hybrid structures

This report describes a dual-deposition setup for fabricating well-defined nanoparticles-thin film structures. The setup consists of a particle synthesis section for the gas phase generation of size-selected nanoparticles and a deposition section for the sequential growth of thin film and nanoparticle layers on substrates using vacuum evaporation and atmospheric pressure electrostatic precipitator techniques, respectively. The setup has been used to deposit Pd nanoparticles-Pr thin film structures. Average sizes and size distributions of Pd nanoparticles measured online during the particle synthesis by means of electrical mobility analysis have been compared with those of nanoparticle samples deposited on Pr thin film and other substrates and measured by high resolution scanning electron microscopy and transmission electron microscopy techniques. The setup is useful for depositing a variety of nanoparticles-thin film structures.