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Computer-generated microcooled reflection holograms in silicon for material processing with a CO(2) laser.

C Haupt, M Pahlke, R Krupka

    Applied Optics
    |July 1, 1997
    PubMed
    Summary

    Researchers developed multilevel silicon holograms for CO(2) laser processing. These holograms achieve 88% diffraction efficiency and exhibit significantly less deformation than copper mirrors.

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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Laser Technology

    Background:

    • High-power CO(2) laser systems require advanced optical components for precise material processing.
    • Conventional mirrors can suffer from thermal deformation and limited efficiency under high laser intensities.
    • Computer-generated holograms offer a potential solution for improved beam control and thermal management.

    Purpose of the Study:

    • To design, fabricate, and test multilevel computer-generated reflection holograms in silicon (Si) for CO(2) laser material processing.
    • To evaluate the performance of these holograms concerning diffraction efficiency and thermal deformation.
    • To compare the performance of silicon holograms with conventional copper mirrors.

    Main Methods:

    • Hologram design using an iterative method based on scalar diffraction theory.

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  • Fabrication of multilevel staircase surface topologies via multimask and reactive ion-etching.
  • Chemical etching of a gratinglike microchannel structure on the back side for cooling.
  • Absorption and deformation measurements using a microcooled flat mirror and a reflection hologram.

    • Main Results:

    • Achieved a maximum diffraction efficiency of 88% with an eight-level reflection hologram.
    • Demonstrated that the reconstructed intensity distribution is independent of the incident high-power laser mode.
    • Measured a maximum deformation of 200 nm, which is 10 times smaller than comparable uncoated copper mirrors.
    • Successfully tested holograms for laser intensities below 2 kW/cm(2).

    Conclusions:

    • Multilevel silicon computer-generated reflection holograms are effective for CO(2) laser material processing.
    • The fabricated holograms offer high diffraction efficiency and superior thermal stability compared to conventional mirrors.
    • The integrated microchannel cooling enhances the performance and durability of the holographic optical elements.