R Waldhäusl1, B Schnabel, P Dannberg
1Fraunhofer-Institute for Applied Optics and Precision Engineering, Schillerstrasse 1, D-07745 Jena, Germany.
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Highly efficient grating couplers for polymer waveguides were fabricated using electron-beam lithography, achieving up to 67% input efficiency. This technology enables all-polymeric optical chips with improved light coupling and focusing properties.
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