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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
10:39

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

Published on: August 5, 2020

Motional capacitance of layered piezoelectric thickness-mode resonators

M Schmid1, E Benes, W Burger

  • 1Inst. fuer Allgemeine Phys., Tech. Univ., Wien.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|January 1, 1991
PubMed

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