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Updated: Jul 7, 2026
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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
Published on: February 5, 2020
Physical structure of lithium niobate thin films
T A Rost1, T A Rabson, B A Stone
1Dept. of Electr. and Comput. Eng., Rice Univ., Houston, TX.
Abstract:
Thin films of LiNbO have been RF sputter deposited on silicon and sapphire substrates. A number of analytical techniques have been used to determine the physical structure of these films. This analysis shows that the resulting films are stoichiometric LiNbO(3) and oriented polycrystalline in nature. It is now possible to consider applications which utilize the unique properties of these films.
