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Updated: Dec 29, 2025

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Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
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Ordered ZnO nanorods synthesized by combustion chemical vapor deposition
1GE Global Research, Torrance, 19310 Pacific Gateway Drive, Torrane, CA 90502-1031, USA.
Journal of Nanoscience and Nanotechnology
|February 21, 2008
Abstract:
Aligned single-crystal ZnO rod arrays with diameters ranging from 50 nm to 300 nm and length up to 10 microm have been synthesized on silicon substrate under open-air conditions using a combustion chemical vapor deposition (CVD) method. The ZnO rods grew in the direction of (0001) with six [1120] peripheral surface planes. A single ZnO rod solid-state gas sensor fabricated on an interdigitated electrode pattern demonstrated prompt response to ethanol vapor at 400 degrees C.

