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Updated: Jul 7, 2026

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Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy
Published on: May 12, 2020
Low-loss ZnO optical waveguides for SAW-AO applications.
1Fac. of Eng., Kyoto Univ.
Summary
High-efficiency acoustooptic Bragg deflectors (ABDs) were created using zinc oxide (ZnO) thin films. These devices achieved excellent diffraction efficiencies on various substrates, showcasing their potential for optical applications.
Area of Science:
- Materials Science
- Optoelectronics
- Physics
Background:
- Acoustooptic Bragg deflectors (ABDs) are crucial components in optical systems.
- High diffraction efficiency is a key performance metric for ABDs.
- Zinc oxide (ZnO) is a promising material for optoelectronic devices due to its unique properties.
Purpose of the Study:
- To fabricate high-efficiency acoustooptic Bragg deflectors (ABDs) using ZnO thin films.
- To evaluate the performance of ZnO-based ABDs on different substrates (sapphire, glass, Si).
- To investigate the impact of interdigital transducer design and surface acoustic wave propagation on diffraction efficiency.
Main Methods:
- Deposition of ZnO thin films using radio frequency (RF) magnetron sputtering.
- Fabrication of ABDs on sapphire, glass, and silicon substrates.
- Measurement of optical waveguide losses and diffraction efficiencies at 632.8 nm.
- Characterization of ABDs with varying interdigital transducer Q values and acoustic wave propagation directions.
Main Results:
- Achieved high diffraction efficiencies of 95% (90 mW acoustic power on glass) and 98% (80 mW acoustic power on Si).
- Observed low optical waveguide losses of approximately 0.5 dB/cm in the ZnO films.
- Determined diffraction efficiencies for ZnO films on sapphire under varied conditions.
Conclusions:
- ZnO thin films are highly effective for fabricating high-performance acoustooptic Bragg deflectors.
- The choice of substrate and transducer design significantly influences ABD performance.
- These findings highlight the potential of ZnO-based ABDs for advanced optical applications.

